Research Issues in MEMS Resonators
نویسنده
چکیده
MEMS resonators have started replacing the quartz crystals and SAW resonators in RF transceivers because of their inherent advantages like high quality factor, small size, robustness and easy integrability with supporting electronics. The paper presents the developments that have taken place in MEMS resonators. Some of the issues in the design and development of electrostatically transduced MEMS resonators have been identified through the literature survey. Applications of MEMS resonators and few of the commercially available MEMS resonators are discussed.
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